Abstract: In an automated fabrication facility, the thin, fragile silicon wafers in which semiconductor circuits are formed must be transported to and from processing stations with a minimum of ...

Surface metrology details the techniques used to characterize the topography, roughness, and other properties of ...

Vacuum manipulators are used to move or position wafer or items in specialized vacuum chambers and for material handling applications. They provide increased flexibility because rigid links are not ...

The full release from Canon Inc. can be found here. Optional products including a wafer handling system for special ...